Electronic ion source - List of Manufacturers, Suppliers, Companies and Products | IPROS GMS

World's smallest class ECR electron and ion source series, such as TES-40.

Kyushu Measuring Instruments is the only authorized dealer in Japan.

CAMECA (formerly Polygon Physics) TES series is an ECR electron and ion source that achieves highly stable electron and ion beams. Its filament-free, cooling-free compact design ensures high stability and low maintenance. It is suitable for a wide range of applications including etching, sputtering, surface modification, and mass analysis.